This paper presents the frequency dependence of capacitance in high-density barrier type anodic TiO2 metal-insulator-metal (MIM) capacitor. For a capacitance density of 30fF/μm2, it is found that increase in anodization voltage influences the capacitance variation with frequency because of change in crystalline and polarization properties of TiO2. The defect profile is extracted and the polarization is studied using “Electrode polarization” model. The model and measurement results show that anodic TiO2 is a potential candidate for high quality MIM capacitors for applications with wide operation frequency range.
Frequency dependence of capacitance modeling in metal-insulator-metal capacitors
2017-04-01
272196 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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