The system approach considers a priori the interdependence of all technologies integrated into a photonic MEMS product. Enabling wafer-level batch manufacturing through process integration is key to successful product development and meaningful cost reduction.
The system approach in photonic MEMS commercialization
The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society ; 2 ; 413-415 vol.2
01.01.2002
253822 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
WG2 The System Approach in Photonic MEMS Commercialization
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