The compatibility of porous silicon, (PSi) and anodic bonding (AB) technologies for the realization of sensing microcomponents in lab-on-chip applications is demonstrated. Sensor for chemical and biological species have been fabricated promising further integration with optical and micromechanical devices.
Integrated silicon-glass opto-chemical sensor for lab-on-chip applications
2004-01-01
133417 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Integrated Silicon-Glass Optical Sensor for Lab-on-Chip Applications
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