The compatibility of porous silicon, (PSi) and anodic bonding (AB) technologies for the realization of sensing microcomponents in lab-on-chip applications is demonstrated. Sensor for chemical and biological species have been fabricated promising further integration with optical and micromechanical devices.


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    Titel :

    Integrated silicon-glass opto-chemical sensor for lab-on-chip applications


    Beteiligte:
    De Stefano, L. (Autor:in) / Malecki, K. (Autor:in) / Moretti, L. (Autor:in) / Della Corte, F. (Autor:in) / Rendina, I. (Autor:in)


    Erscheinungsdatum :

    2004-01-01


    Format / Umfang :

    133417 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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