This paper reports a dual effort to fabricate and calibrate micromachined shear stress sensors for wind tunnel instrumentation. Our team at CWRU has designed and fabricated both active and passive shear stress sensors based on microfabricated polysilicon lateral resonant structures. In addition to this effort, we have collaborated with Analog Devices to develop shear stress sensors with integrated electronics based on existing accelerometer devices and process technology. Sensors from both efforts have been tested in a macroscopic flow channel for characterization in compressible flow. The sensors from CWRU were optically calibrated at 9 Pa//spl mu/m of floating element deflection. The integrated sensors demonstrated a nominal sensitivity of 6 Pa/V. Packaging issues were found to be critical for proper sensor design and calibration. Misalignment of a few degrees from parallel to the fluid flow results in an order of magnitude difference in integrated sensor output.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Characterization of microfabricated shear stress sensors


    Beteiligte:
    Tao Pan (Autor:in) / Hyman, D. (Autor:in) / Mehregany, M. (Autor:in) / Reshotko, E. (Autor:in) / Willis, B. (Autor:in)


    Erscheinungsdatum :

    01.01.1995


    Format / Umfang :

    916001 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch




    Characterization of Microfabricated Shear Stress Sensors

    Pan, T. / Hyman, D. / Mehregany, M. et al. | British Library Conference Proceedings | 1995


    Microfabricated Shear Stress Sensors, Part 2: Testing and Calibration

    Dan Hyman / Tao Pan / Eli Reshotko et al. | AIAA | 1999


    Microfabricated Shear-Stress Sensors, Part 3: Reducing Calibration Uncertainty

    Mehul P. Patel / Eli Reshotko / Daniel Hyman | AIAA | 2002


    Microfabricated Shear Stress Sensors, Part 1: Design and Fabrication

    Tao Pan / Daniel Hyman / Mehran Mehregany et al. | AIAA | 1999