The first demonstration of THz imaging by Hu and Nuss has stimulated many suggestions for applications ranging from biomedical imaging to semiconductor device inspection. However, many applications demand a microscopic resolution. For instance, THz imaging of biological cells would require submicron spatial resolutions because many cells have dimensions of the order of 10 /spl mu/m. Even finer resolutions would be required in semiconductor technology where today many devices are smaller than 1 /spl mu/m. Such resolutions are not easy to reach with THz technologies, because of the long wavelength of THz radiation (1 THz corresponds to a wavelength of 300 /spl mu/m). Many works took up the challenge to reduce spatial resolutions down to the 1 /spl mu/m barrier and recently our group demonstrated a resolution of 150 nm.
Development of near-field microscopy for THz imaging
2004-01-01
175688 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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