Laser ablation has proved to be a flexible method for direct micro-structuring of micro-mechanical, micro-fluid or micro-optical components. In this work we will present recent results on micro-machining of fused silica and different glasses. An excimer laser running at /spl lambda/=248 nm (KrF) or /spl lambda/=351 nm (XeF) (/spl tau//sub p/=20 ns) was used for the experiments. Various solutions of acetone, toluene and tetrachloroethylene containing pyrene in different concentrations (0.1-0.5 M [mol/1]) have been applied for studying the etching process. The influence of the laser and process parameters (e.g. laser fluency, scan velocity, etc.) on the etch rate and the surface roughness of the materials are investigated quantitatively with the aim of process optimization. Using these parameters the fabrication of three-dimensional micro-topographies in fused silica, pyrex and other glass by direct laser writing with the scanning contour mask technique will be shown. The etched cylindrical structures and micro-prisms show sharp edges and smooth surfaces with micro-roughness below 10 nm RMS at a etch depth of more than 30 /spl mu/m. Also the machining of linear or crossed phase gratings with a period less than 20 /spl mu/m is mentioned.
Laser fabrication of micro sized diffractive and refractive optical devices in fused silica and glass
2003-01-01
123214 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Fabrication of Refractive and Diffractive Micro-Optical Structures in Diamond
British Library Conference Proceedings | 2002
|DWD2 Refractive and diffractive micro-optics in optical interconnects
British Library Conference Proceedings | 2000
|Free-space optical networks using diffractive and refractive micro-optics
British Library Conference Proceedings | 1993
|