We describe here a sensor consisting of a line defect photonic crystal waveguide suspended over a silicon substrate. Under applied pressure, the photonic crystal waveguide is deflected toward the substrate, causing a decrease in optical transmission due to the coupling of the waveguide field to the silicon substrate. Bridge engineering can increase the mechanical sensitivity of the bridge: maintaining constant bridge footage, we are able to increase sensitivity by about 5.5 times.


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    Titel :

    Mechanical sensitivity enhancement of silicon based photonic crystal micro-pressure sensor


    Beteiligte:
    Bakhtazad, A (Autor:in) / Sabarinathan, J (Autor:in) / Hutter, J L (Autor:in)


    Erscheinungsdatum :

    01.10.2010


    Format / Umfang :

    674826 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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