A new MEMS VOA with continuous motion was developed. The self-assembly mechanism was achieved by means of "extra" residual beam. We demonstrated that the optical performance had 70dB attenuation range and less than 1 dB insertion loss for this device.
Out-of-plane MEMS shutter with continuous motion capability for VOA application
2003-01-01
60908 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Out-of-plane MEMS shutter with continuous motion capability for VOA application
British Library Conference Proceedings | 2003
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