A new MEMS VOA with continuous motion was developed. The self-assembly mechanism was achieved by means of "extra" residual beam. We demonstrated that the optical performance had 70dB attenuation range and less than 1 dB insertion loss for this device.


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    Titel :

    Out-of-plane MEMS shutter with continuous motion capability for VOA application


    Beteiligte:
    Yen-Jyh Lai, (Autor:in) / Chia-Yu Wu, (Autor:in) / Chengkuo Lee, (Autor:in) / Yu-Shen Lin, (Autor:in) / Wen-Chih Chen, (Autor:in) / Chihchung Chen, (Autor:in) / Ming-Hung Tsai, (Autor:in) / Ruey-Shing Huang, (Autor:in) / Min-Shyong Lin, (Autor:in)


    Erscheinungsdatum :

    2003-01-01


    Format / Umfang :

    60908 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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