In this paper, presented are a resonance type accelerometer, its implementation and results of performance test. The structure and principle of resonance type accelerometer are illustrated concisely. A pure surface micromachining technology is used for the structure manufacturing. Fundamental idea of this sensor is to detect variation of effective stiffness from parallel-plated electrostatic resonator. Since resonant accelerometer needs to keep track of the system's resonance point, a feedback loop called self-sustained oscillation loop is designed. The resonant point and its stability robustness are analyzed using nonlinear control methodologies, i.e., describing function method and extended Nyquist stability criterion. Environmental test and theoretical analysis confirmed that the oscillation loop is very robust to external disturbances.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Development of a tunable resonant accelerometer with self-sustained oscillation loop


    Beteiligte:
    Sangkyung Sung, (Autor:in) / Jang Gyu Lee, (Autor:in) / Taesam Kang, (Autor:in) / Jin Woo Song, (Autor:in)


    Erscheinungsdatum :

    2000-01-01


    Format / Umfang :

    799482 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    Development Of A Resonance Type Accelerometer With Self-Sustained Oscillation Loop

    Sung, S. / IEEE | British Library Conference Proceedings | 2000


    Pendular accelerometer for detecting threshold oscillation values

    CONSOLI LUCIANO | Europäisches Patentamt | 2016

    Freier Zugriff



    Development and Performance Test of a Differential Type Resonant Accelerometer

    Lee, Jang Gyu / Sung, Sangkyung / Hyun, Chul et al. | AIAA | 2003