A highly ordered nanohole-array architecture with high aspect ratios was fabricated based on the anodization of Al. In the report, two types of fabrication processes for highly ordered nanohole arrays, and their application to several kinds of nanofabrication for optical devices are described.
Highly ordered hole-array architecture in anodic alumina for optical devices
2001-01-01
350545 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Highly Ordered Hole-Array Architecture in Anodic Alumina for Optical Devices
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