The paper reports of the fabrication and transmission characterization of the oxide-cladding- (OC) type photonic crystal (PC) slab waveguides (WG). By designing the PC-WG structure sandwiched between conventional ridge WGs and examining experimentally the oxidation, which often causes a strain-related fabrication trouble, the strain-free OC-PC WGs was successfully fabricated. Subsequent transmission characterization demonstrated the good property of the OC-PC waveguides and proved the validity of the fabrication technique.
Fabrication and characterization of the oxide-cladding-type AlGaAs-based photonic-crystal slab waveguides sandwiched between partially oxidized ridge waveguides
2003 Digest of LEOS Summer Topical Meeting (Cat. No.03TH8701) ; WA2.2/81-WA2.2/82
2003-01-01
197988 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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