The following topics are dealt with: MEMS fundamentals; MEMS fabrication technology; MEMS market and industry structure; defense applications; investment assessment; inertial measurement devices; multiple device chips; optical MEMS components; monolithic free-space optical disk pickup head; digital micromirror display; optomechanical displays; environmental monitoring sensors; wireless integrated microsensors; tactical remote sensors; mass spectrograph; miniature analytical instrumentation; microdisk arrays for data storage; multi-user MEMS projects; electronic design aids; fluid flow analysis; and MEMS technology trends.
Microelectromechanical systems (MEMS)
1997 IEEE Aerospace Conference ; 3 ; 9-43 vol.3
01.01.1997
6010134 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Microelectromechanical Systems (MEMS)
NTRS | 1999
|MicroElectroMechanical Systems (MEMS)
British Library Conference Proceedings | 1997
|Testing requirements for microelectromechanical systems (MEMS)
Tema Archiv | 1998
|Microelectromechanical Systems (MEMS) Technology Integration into Microspacecraft
British Library Conference Proceedings | 1995
|