The following topics are dealt with: MEMS fundamentals; MEMS fabrication technology; MEMS market and industry structure; defense applications; investment assessment; inertial measurement devices; multiple device chips; optical MEMS components; monolithic free-space optical disk pickup head; digital micromirror display; optomechanical displays; environmental monitoring sensors; wireless integrated microsensors; tactical remote sensors; mass spectrograph; miniature analytical instrumentation; microdisk arrays for data storage; multi-user MEMS projects; electronic design aids; fluid flow analysis; and MEMS technology trends.


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    Titel :

    Microelectromechanical systems (MEMS)


    Beteiligte:
    Gabriel, K.J. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    01.01.1997


    Format / Umfang :

    6010134 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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