Segmented MEMS mirrors have the potential to revolutionize optical designs for imaging and beam directing systems. Foveated imaging, adaptive optical zoom, and enhanced multi-spectral capability have already been demonstrated at Sandia National Laboratories using MEMS elements. The high stroke and individual segment control with piston and 2-directional tilt is very attractive for these and other applications. To address the challenge of characterizing segmented MEMS mirrors, a novel closed loop optimization algorithm has been developed to drive the mirrors to a desired shape utilizing feedback from a WYKO interferometer. This method has proved to produce more accurate results than previous attempts to drive the mirror with an open loop model.
Characterization algorithm for segmented MEMS mirrors
01.03.2009
438110 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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