Electronic sensing circuitry and micro-electro-mechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M/sup 3/EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers.
Integrated micro-electro-mechanical sensor development for inertial applications
IEEE Aerospace and Electronic Systems Magazine ; 13 , 11 ; 36-40
1998-11-01
552822 byte
Aufsatz (Zeitschrift)
Elektronische Ressource
Englisch
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