Electronic sensing circuitry and micro-electro-mechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M/sup 3/EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers.


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    Titel :

    Integrated micro-electro-mechanical sensor development for inertial applications


    Beteiligte:
    Allen, J.J. (Autor:in) / Kinney, R.D. (Autor:in) / Sarsfield, J. (Autor:in) / Daily, M.R. (Autor:in) / Ellis, J.R. (Autor:in) / Smith, J.H. (Autor:in) / Montague, S. (Autor:in) / Howe, R.T. (Autor:in) / Boser, B.E. (Autor:in) / Horowitz, R. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    1998-11-01


    Format / Umfang :

    552822 byte




    Medientyp :

    Aufsatz (Zeitschrift)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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