One approach to compact UV light sources is an all-solid-state 193 nm laser system, which utilizes an Er-doped fiber amplifier (EDFA) of 1547 nm wavelength as part of the fundamental light source, and five-stage frequency conversion optics for generating the eighth harmonic of 193 nm light. We propose the use of Gd/sub x/Y/sub 1-x/Ca/sub 4/O(BO/sub 3/)/sub 3/ as the fourth-harmonic crystal to improve the wavelength conversion optics, and report the results of durability tests up to 500 hours.


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    Titel :

    A 193 nm light source using fiber amplifier and nonlinear wavelength conversion


    Beteiligte:
    Owa, S. (Autor:in) / Doi, M. (Autor:in) / Kawai, H. (Autor:in) / Kitano, H. (Autor:in) / Miwa, S. (Autor:in) / Matsuura, H. (Autor:in) / Tokuhisa, A. (Autor:in)


    Erscheinungsdatum :

    2001-01-01


    Format / Umfang :

    120125 byte





    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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