In this paper, we implement a wavelength tunable filter based on polysilicon covered SOI wafer. The SOI filter is achieved by e-beam writing a reflective wavelength tunable grating on MMI SOI waveguide.
Implementation process of a reflective-type electrical tunable SOI optical filter
2003-01-01
69975 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Implementation process of a reflective-type electrical tunable SOI optical filter
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