This study discusses MEMS technology including design, modeling, and fabrication facilities, along with a diverse set of optical MEMS devices. This device technology is available for any application, but is particularly well suited for optical (data) interconnection in telecommunications.


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    Titel :

    MEMS technology for optical interconnects


    Beteiligte:
    Ford, J.E. (Autor:in)


    Erscheinungsdatum :

    01.01.2003


    Format / Umfang :

    174864 byte





    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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