The limits of nanoscale machining with sub-picosecond pulsed lasers are systematically characterized. We propose that the minimum scale is ultimately limited by the valence electron density, thus enabling highly reproducible machining at the nanometer scale.


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    Titel :

    Exploring the deterministic nature of femtosecond laser-induced optical breakdown and applications to nanomachining


    Beteiligte:
    Hunt, A.J. (Autor:in) / Joglekar, A. (Autor:in) / Meyhofer, E. (Autor:in) / Hsiao-hua Liu, (Autor:in) / Mourou, G. (Autor:in)


    Erscheinungsdatum :

    2004-01-01


    Format / Umfang :

    202193 byte



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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