A 64/spl times/64 element kinoform was microfabricated in fused silica by direct ablation with a pulsed 157-nm laser source that circumvents multistep lithographic patterning and etching routines. A 4-level design of /spl sim/300-nm etch layers is described.
Kinoform optics: direct fabrication by F/sub 2/ laser ablation
2003-01-01
299056 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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