A 64/spl times/64 element kinoform was microfabricated in fused silica by direct ablation with a pulsed 157-nm laser source that circumvents multistep lithographic patterning and etching routines. A 4-level design of /spl sim/300-nm etch layers is described.


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    Titel :

    Kinoform optics: direct fabrication by F/sub 2/ laser ablation


    Beteiligte:
    Nejadmalayeri, A.H. (Autor:in) / Yick, A. (Autor:in) / Li, J. (Autor:in) / Herman, P.R. (Autor:in)


    Erscheinungsdatum :

    2003-01-01


    Format / Umfang :

    299056 byte



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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