We report on the growth and fabrication of back-illuminated solar-blind photodetector array based on the AlGaN material system using low-pressure metalorganic chemical vapor deposition. Discrete photodetector devices exhibited a high external quantum efficiency of 58% and 256/spl times/256 photodetector arrays exhibited a high operability of >99%.
MOCVD grown solar-blind photodetector arrays
2003-01-01
261843 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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