In this study, a novel technique, i.e. the direct-current current-voltage (DCIV) method is used to quantitatively examine the influence of nitrogen concentration in nitrided oxide on interface trap generation caused by DC and dynamic Fowler-Nordheim (FN) injections. For both DC and dynamic FN stresses, a power-law stress-time dependence of interface trap generation is always observed, and the increase of nitrogen concentration leads to a significant suppression of interface trap generation. For the dynamic stress, interface trap generation increases with frequency, but the interface trap generation at each frequency is reduced with a higher nitrogen concentration. A comparison of interface trap generation between DC and dynamic stresses and explanation for the difference are presented. The nitridation effect on the interface trap generation can be explained by the models based on either the rigid Si-N bonds at the interface or the nitrided oxide impediment to the damaging positive species such as H/sup +/ or holes.
Study of influence of nitrogen concentration in nitrided oxide on interface trap generation
2002-01-01
175404 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Study of Influence of Nitrogen Concentration in Nitrided Oxide on Interface Trap Generation
British Library Conference Proceedings | 2002
|Engineering Index Backfile | 1944
|Trap generation diagnosis apparatus and trap generation diagnosis method
Europäisches Patentamt | 2020
|Nitrided, oil and air hardened steel
Engineering Index Backfile | 1939
|Comparative Tribological Behavior of Nitrided and Non-Nitrided SAE XEV-F Valve Steel in Dry Sliding
SAE Technical Papers | 2017
|