Prototyped XY-stages driving electron beam (EB) writing system is developed to research the possibility to write fine patterns. High density optical recording pattern with 25 Gbit/in/sup 2/ is demonstrated. It is also clear that EB writing (drawing) system has a potential to achieve a required fine pattern for 100 Gbit/in/sup 2/.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Prototyped XY stages driving EB mastering for a high density optical recording


    Beteiligte:
    Hosaka, S. (Autor:in) / Koyanagi, H. (Autor:in) / Katoh, K. (Autor:in) / Isshiki, F. (Autor:in) / Suzuki, T. (Autor:in) / Miyamoto, M. (Autor:in) / Miyauchi, Y. (Autor:in) / Arimoto, A. (Autor:in) / Nishida, T. (Autor:in)


    Erscheinungsdatum :

    2001-01-01


    Format / Umfang :

    195274 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    Prototyped XY Stages Driving EB Mastering for a High Density Optical Recording

    Hosaka, S. / Koyanagi, H. / Katoh, K. et al. | British Library Conference Proceedings | 2001


    High-density optical disk mastering using UV light source

    Katsuda, S. / Ishizuka, K. / Ohmura, N. et al. | British Library Conference Proceedings | 1994


    Future developments for high-density optical disk mastering [3562-31]

    Verhaart, D. / SPIE | British Library Conference Proceedings | 1998


    Evaluation of a level 2 automated driving system prototyped in a dynamic simulator

    Simon, P. / Floris, J. / Benloucif, M. A. et al. | TIBKAT | 2019


    Near future VANET's prototyped by the Moway robot.

    Cuenca Granados, Javier | BASE | 2009

    Freier Zugriff