Prototyped XY-stages driving electron beam (EB) writing system is developed to research the possibility to write fine patterns. High density optical recording pattern with 25 Gbit/in/sup 2/ is demonstrated. It is also clear that EB writing (drawing) system has a potential to achieve a required fine pattern for 100 Gbit/in/sup 2/.
Prototyped XY stages driving EB mastering for a high density optical recording
2001-01-01
195274 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Prototyped XY Stages Driving EB Mastering for a High Density Optical Recording
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