A substrate transporting arm and a substrate transporting apparatus to prevent a substrate from sliding and increase a process speed of the substrate, thereby improving productivity. The substrate transporting arm includes a body and a plurality of substrate supporters coupled to the body. Each of the plurality of substrate supporters includes a substrate holder and a substrate supporter pin, and an inner side of the substrate holder includes an inclined portion.
Substrate transferring arm and substrate transferring apparatus including the same
15.11.2016
Patent
Elektronische Ressource
Englisch
IPC: | B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last / B25J Manipulatoren , MANIPULATORS / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES |
SUBSTRATE TRANSFERRING APPARATUS AND SUBSTRATE TRANSFERRING METHOD
Europäisches Patentamt | 2024
|Caster apparatus and transferring apparatus including the same
Europäisches Patentamt | 2020
|CASTER APPARATUS AND TRANSFERRING APPARATUS INCLUDING THE SAME
Europäisches Patentamt | 2017
|