An end effector includes: a hand; a substrate holder provided on the hand; a mapping detector provided at distal end portions and of the hand; a light emitter, which the hand is provided with and which is configured to generate detection light; a light receiver, which the hand is provided with and which is configured to receive the detection light and convert the detection light into an electrical output; and an optical path formed such that the detection light emitted from the light emitter passes through the optical path to be incident on the light receiver; the optical path is formed such that detection light is blocked by a substrate detected in a cassette by the mapping detector, and such that detection light is blocked by a substrate held by the substrate holder.


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    Titel :

    End effector


    Beteiligte:
    YOSHIDA TETSUYA (Autor:in) / SHIBATA TAKESHI (Autor:in)

    Erscheinungsdatum :

    2016-09-27


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last / B25J Manipulatoren , MANIPULATORS / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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