A diaphragm device comprising: a supporting member; a flexible membrane that is supported by the supporting member; and a housing that accommodates the flexible membrane and the supporting member, and wherein the flexible membrane air-tightly separates a first chamber and a second chamber connected to the outside through a through-hole formed in a membrane supporting portion of the supporting member, inside the housing, wherein an avoidance recessed portion to avoid interference with an opening edge of the through-hole is formed at a position corresponding to the through-hole in the flexible membrane, wherein the avoidance recessed portion is provided at a thick portion thicker than the other portion of the flexible membrane, and the thick portion protrudes toward the first chamber.
Diaphragm device and pressure regulating reservoir using the same
05.04.2016
Patent
Elektronische Ressource
Englisch
Vibrating diaphragm type high frequency pressure regulating device
Europäisches Patentamt | 2015
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