Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the substrate, a membrane and a second electrode connected to the membrane.
SYSTEMS AND METHODS OF OPERATION OF CAPACITIVE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCHES
2023-01-12
Patent
Elektronische Ressource
Englisch
IPC: | B06B GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL , Erzeugen oder Übertragen mechanischer Schwingungen allgemein / B60B VEHICLE WHEELS , Räder für Fahrzeuge / G01N Untersuchen oder Analysieren von Stoffen durch Bestimmen ihrer chemischen oder physikalischen Eigenschaften , INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES |
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