A travel robot for moving a substrate transfer robot in a vacuum chamber, includes: an elevating part located in a lower outer region of a housing, sealing the vacuum chamber, wherein an elevating drive shaft moves through a vacuum chamber through-hole; a travel arm platform through which coupling holes are formed, wherein the elevating drive shaft is inserted into a lower space of one of the coupling holes; a first travel arm part including a (1_1)-st and a (1_2)-nd travel link arms; a second travel arm part including a (2_1)-st and a (2_2)-nd travel link arms, wherein travel driving motors and speed reducers are installed in the (1_1)-st and the (2_1)-st travel link arms; and a transfer robot coupling part engaged with the (1_2)-nd and the (2_2)-nd travel link arms, wherein a rotation driving motor built thereon is engaged with the substrate transfer robot by a rotation drive shaft.


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    Titel :

    Travel Robot For Moving Substrate Transfer Robot In Vacuum Chamber


    Beteiligte:
    LEE SOO JONG (Autor:in) / KIM MYUNG JIN (Autor:in) / LEE CHANG SEONG (Autor:in) / BAEK SEUNG YOUNG (Autor:in) / JEE CHANG HYUN (Autor:in) / HAM SANG HWI (Autor:in) / HUR MOON GI (Autor:in) / PARK JAE HYUN (Autor:in) / LEE TAE HAN (Autor:in)

    Erscheinungsdatum :

    2022-12-01


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B61B RAILWAY SYSTEMS , Eisenbahnanlagen



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