A method for transferring a container configured to hold at least one article used in semiconductor fabrication is provided. The method includes moving a transferring mechanism to a first position that is adjacent to the original space; producing an image of an edge of the container that is adjacent to the original space using an optical receiver before the container is moved to a destination space; and performing an image analysis of the image to determine whether to move the container to the destination space.
METHOD FOR TRANSFERRING CONTAINER
2021-02-11
Patent
Elektronische Ressource
Englisch
IPC: | B60P Fahrzeuge zum Transport von Lasten oder zum Befördern, Tragen oder Aufnehmen besonderer Lasten oder Gegenstände , VEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS / B65D Behältnisse zur Lagerung oder zum Transport von Gegenständen oder Materialien [Container], z.B. Säcke, Beutel, Fässer, Flaschen, Dosen, Kästen, Büchsen, Schachteln, Packkörbe, Tonnen, Gläser, Flüssigkeitsbehälter, Trichtersilos, Transportbehälter , CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS / B66C Krane , CRANES / G06T Bilddatenverarbeitung oder Bilddatenerzeugung allgemein , IMAGE DATA PROCESSING OR GENERATION, IN GENERAL / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES |