A vibration device includes a base substrate made of silicon and having a first surface and a second surface facing away from the first surface, a lid bonded to the base substrate, a vibrator disposed at the first surface of the base substrate and accommodated in a space between the base substrate and the lid, and a thermistor element disposed at the base substrate.
Vibration Device, Electronic Apparatus, And Vehicle
29.10.2020
Patent
Elektronische Ressource
Englisch
VIBRATION DEVICE, VIBRATION MODULE, ELECTRONIC APPARATUS, AND VEHICLE
Europäisches Patentamt | 2020
|Vibration device, vibration module, electronic apparatus, and vehicle
Europäisches Patentamt | 2021
|