An inertial sensor includes, assuming an X-axis, a Y-axis, and a Z-axis, a substrate, a movable body that swings around a swing axis along the Y-axis, a fixed portion that supports the movable body and is fixed to the substrate, and a stopper that is fixed to the substrate and regulates rotational displacement of the movable body around the Z-axis by coming into contact with the movable body, and in which the stopper includes a first stopper facing the movable body along the Y-axis and having a separation distance L1 from the swing axis and a second stopper facing the movable body along the Y-axis and having a separation distance L2 shorter than the separation distance L1 from the swing axis, and the movable body comes into contact with the first stopper and the second stopper simultaneously when the movable body is rotationally displaced.
INERTIAL SENSOR, ELECTRONIC DEVICE, AND VEHICLE
2020-07-30
Patent
Elektronische Ressource
Englisch
IPC: | G01P MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK , Messen der Linear- oder Winkelgeschwindigkeit, der Beschleunigung, der Verzögerung oder des Stoßes / B60W CONJOINT CONTROL OF VEHICLE SUB-UNITS OF DIFFERENT TYPE OR DIFFERENT FUNCTION , Gemeinsame Steuerung oder Regelung von Fahrzeug-Unteraggregaten verschiedenen Typs oder verschiedener Funktion |