A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one of either the granular tray or the chunk tray. A valve mechanism and pulse vibrator are also disclosed.
SYSTEMS FOR SELECTIVELY FEEDING CHUNK POLYSILICON OR GRANULAR POLYSILICON IN A CRYSTAL GROWTH CHAMBER
2020-03-12
Patent
Elektronische Ressource
Englisch
Europäisches Patentamt | 2019
|Europäisches Patentamt | 2019
|Europäisches Patentamt | 2020
|Europäisches Patentamt | 2021
|Overview of Polysilicon Technology
British Library Conference Proceedings | 1996
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