A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one of either the granular tray or the chunk tray. A valve mechanism and pulse vibrator are also disclosed.
Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber
2020-03-03
Patent
Elektronische Ressource
Englisch
IPC: | C30B SINGLE-CRYSTAL GROWTH , Züchten von Einkristallen / B64G Raumfahrt , COSMONAUTICS / B66D Haspeln , CAPSTANS / G01P MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK , Messen der Linear- oder Winkelgeschwindigkeit, der Beschleunigung, der Verzögerung oder des Stoßes / G01S RADIO DIRECTION-FINDING , Funkpeilung |
Europäisches Patentamt | 2020
|Europäisches Patentamt | 2019
|Europäisches Patentamt | 2019
|Europäisches Patentamt | 2021
|Overview of Polysilicon Technology
British Library Conference Proceedings | 1996
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