An airlock system that includes a plurality of adjacent chambers successively arranged along a guide path. Predetermined pressures are produced in each chamber so that the predetermined pressure in each chamber is at a pressure different from the predetermined pressure produced in an adjacent chamber. Gate valves are positioned to separate adjacent chambers in order to maintain a pressure differential between the adjacent chambers.
SERIAL AIRLOCK ARCHITECTURE
2019-11-14
Patent
Elektronische Ressource
Englisch
NTRS | 1984
|