A physical quantity sensor includes a driven section and a drive spring that supports the driven section so that the driven section is displaceable in a first direction. The drive spring has a serpentine shape and includes a plurality of spring structures extending in a second direction that intersects a first direction. At least one of the spring structures has a thin section that is thinner in a third direction that intersects the first and second directions than the other portions of the drive spring.
Physical Quantity Sensor, Method For Manufacturing Physical Quantity Sensor, Physical Quantity Sensor Device, Electronic Apparatus, And Vehicle
2018-10-25
Patent
Elektronische Ressource
Englisch
IPC: | G01C Messen von Entfernungen, Höhen, Neigungen oder Richtungen , MEASURING DISTANCES, LEVELS OR BEARINGS / B60W CONJOINT CONTROL OF VEHICLE SUB-UNITS OF DIFFERENT TYPE OR DIFFERENT FUNCTION , Gemeinsame Steuerung oder Regelung von Fahrzeug-Unteraggregaten verschiedenen Typs oder verschiedener Funktion / G01P MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK , Messen der Linear- oder Winkelgeschwindigkeit, der Beschleunigung, der Verzögerung oder des Stoßes |
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