A physical quantity sensor includes a driven section and a drive spring that supports the driven section so that the driven section is displaceable in a first direction. The drive spring has a serpentine shape and includes a plurality of spring structures extending in a second direction that intersects a first direction. At least one of the spring structures has a thin section that is thinner in a third direction that intersects the first and second directions than the other portions of the drive spring.


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    Titel :

    Physical Quantity Sensor, Method For Manufacturing Physical Quantity Sensor, Physical Quantity Sensor Device, Electronic Apparatus, And Vehicle


    Beteiligte:
    FURUHATA MAKOTO (Autor:in) / KANEMOTO KEI (Autor:in)

    Erscheinungsdatum :

    2018-10-25


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    G01C Messen von Entfernungen, Höhen, Neigungen oder Richtungen , MEASURING DISTANCES, LEVELS OR BEARINGS / B60W CONJOINT CONTROL OF VEHICLE SUB-UNITS OF DIFFERENT TYPE OR DIFFERENT FUNCTION , Gemeinsame Steuerung oder Regelung von Fahrzeug-Unteraggregaten verschiedenen Typs oder verschiedener Funktion / G01P MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK , Messen der Linear- oder Winkelgeschwindigkeit, der Beschleunigung, der Verzögerung oder des Stoßes