A vibration device includes a vibration element that has a plurality of terminals, a base that has a plurality of electrical connection terminals, and a board that has a wiring portion which electrically connects the plurality of electrical connection terminal and the plurality of terminals to each other, and that supports the vibration element with respect to the base. The board has a base fixing portion fixed to the base, a vibration element mounting portion on which the vibration element is mounted, and at least one beam portion which couples the base fixing portion and the vibration element mounting portion to each other. At least the one beam portion has a first portion which extends in a first direction and a second portion which extends in a second direction intersecting the first direction.
VIBRATION DEVICE, ANGULAR VELOCITY SENSOR, ELECTRONIC DEVICE, AND VEHICLE
2018-09-27
Patent
Elektronische Ressource
Englisch
Vibration device, angular velocity sensor, electronic device, and vehicle
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