Provided is a linear motor motion stage having a passive reaction force compensation function. The linear motor motion stage includes: a base; a magnet track moving on the base; a mover which is moved on a surface of the magnet track by an electromagnetic force generated in a gap with the magnet track; first and second horizontal springs arranged between one side and the other side, respectively, of the magnet track and the base and configured to attenuate a reaction force applied to the base by movement of the mover; and a cross spring arranged between a lower side of the magnet track and the base and configured to attenuate the reaction force. Herein, the linear motor motion stage controls reaction force compensation applied to the linear motor motion stage by controlling the stiffness of the cross spring.
LINEAR MOTOR MOTION STAGE WITH PASSIVE REACTION FORCE COMPENSATION FUNCTION
2018-07-05
Patent
Elektronische Ressource
Englisch
Linear motor motion stage with passive reaction force compensation function
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