An overhead traveling vehicle configured to transport wafers includes a mobile drive unit configured to move along a predetermined route on one side of a ceiling and a hoist unit configured to move along the predetermined route according to a position of the mobile drive unit. The mobile drive unit and the hoist unit respectively include a first magnet and a second magnet so that the hoist unit may be hung on the ceiling by the magnetic force generated between the magnets.


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    Titel :

    OVERHEAD TRAVELING VEHICLE, TRANSPORTATION SYSTEM WITH THE SAME, AND METHOD OF OPERATING THE SAME


    Beteiligte:
    CHEN TSAN-I (Autor:in) / CHEN YU-KUN (Autor:in)

    Erscheinungsdatum :

    2017-07-06


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B66C Krane , CRANES / G05D SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES , Systeme zum Steuern oder Regeln nichtelektrischer veränderlicher Größen / H01F MAGNETS , Magnete



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