An overhead traveling vehicle configured to transport wafers includes a mobile drive unit configured to move along a predetermined route on one side of a ceiling and a hoist unit configured to move along the predetermined route according to a position of the mobile drive unit. The mobile drive unit and the hoist unit respectively include a first magnet and a second magnet so that the hoist unit may be hung on the ceiling by the magnetic force generated between the magnets.
OVERHEAD TRAVELING VEHICLE, TRANSPORTATION SYSTEM WITH THE SAME, AND METHOD OF OPERATING THE SAME
2017-07-06
Patent
Elektronische Ressource
Englisch
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