Linear semiconductor handling systems provide more balanced processing capacity using various techniques to provide increased processing capacity to relatively slow processes. This may include use of hexagonal vacuum chambers to provide additional facets for slow process modules, use of circulating process modules to provide more processing capacity at a single facet of a vacuum chamber, or the use of wide process modules having multiple processing sites. This approach may be used, for example, to balance processing capacity in a typical process that includes plasma enhanced chemical vapor deposition steps and bevel etch steps.


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    Titel :

    Semiconductor manufacturing systems


    Beteiligte:

    Erscheinungsdatum :

    2018-10-02


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B25J Manipulatoren , MANIPULATORS / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B66C Krane , CRANES / F26B DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM , Trocknen von festen Gütern oder Erzeugnissen durch Entfernen von Flüssigkeit / G06F ELECTRIC DIGITAL DATA PROCESSING , Elektrische digitale Datenverarbeitung



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