A MEMS self-aligned high-and-low comb tooth and manufacturing method thereof, the comb tooth having a lifting structure, the lifting structure generating a displacement in the vertical direction to drive the movement of a movable comb tooth or a fixed comb tooth attached thereto. The manufacturing method thereof adopts a silicon wafer, the lifting structure and the comb tooth are sequentially formed on a mechanical structure layer, the fixed comb tooth and the movable comb tooth are formed with the same etching process, and the stress in the lifting structure displaces the fixed comb tooth and the movable comb tooth in the vertical direction, thus forming the self-aligned high-and-low comb tooth.


    Zugriff

    Download


    Exportieren, teilen und zitieren



    Titel :

    MEMS automatic alignment high-and-low comb tooth and manufacturing method thereof


    Beteiligte:
    CHEN QIAO (Autor:in) / XIE HUIKAI (Autor:in)

    Erscheinungsdatum :

    2018-09-18


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    B61B RAILWAY SYSTEMS , Eisenbahnanlagen / B81B Mikrostrukturbauelemente oder -systeme, z.B. mikromechanische Bauelemente , MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES / B81C Verfahren oder Geräte besonders ausgebildet zur Herstellung oder Behandlung von Mikrostrukturbauelementen oder -systemen , PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS



    An All-Silicon Comb-Tooth Capacitive MEMS Accelerometer

    Niu, Haobin / Sun, Guoliang / Wang, Shuaimin et al. | Springer Verlag | 2022


    Comb tooth tower library

    WU HAO | Europäisches Patentamt | 2023

    Freier Zugriff

    Comb tooth lifting type stereo garage and charging method thereof for vehicles

    CHEN HAO | Europäisches Patentamt | 2020

    Freier Zugriff

    Carrier, charging device and comb-tooth type stereo garage

    HU XIAOMIN / MA XINGHUA / ZHAN KAIPIN et al. | Europäisches Patentamt | 2021

    Freier Zugriff

    Efficient comb tooth type transverse moving vehicle carrying platform

    WU HOUTUAN / WANG RONGJIE / MAO YUNING et al. | Europäisches Patentamt | 2023

    Freier Zugriff