본 발명에 따른 클린룸용 작업대는 복수의 팬 필터 유닛을 적절한 위치에 위치시킴으로써, 클린룸 내에서의 청정도 유지를 효과적으로 할 수 있다. 더욱이, 클린룸 내부의 와류 발생을 감소하고, 고소 작업시 작업 공간 내에서 발생된 파티클을 제거함으로써, 클린룸 내부의 고청정도를 유지할 수 있다.
According to the present invention, a clean room workbench can effectively maintain a degree of cleanliness in a clean room by locating a plurality of fan filter units at appropriate positions. Furthermore, it is possible to maintain a high degree of cleanliness inside the clean room by reducing generation of vortex inside the clean room and removing particles generated in the work space when working at high place. The clean room workbench comprises: a base frame; a main frame; a work booth; and a lifting unit.
WORKBENCH FOR CLEAN ROOM
클린룸용 작업대
03.07.2025
Patent
Elektronische Ressource
Koreanisch
IPC: | H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B08B Reinigen allgemein , CLEANING IN GENERAL / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last |
TIBKAT | 1969
|NTIS | 1969
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