본 발명에 따른 클린룸용 작업대는 복수의 팬 필터 유닛을 적절한 위치에 위치시킴으로써, 클린룸 내에서의 청정도 유지를 효과적으로 할 수 있다. 더욱이, 클린룸 내부의 와류 발생을 감소하고, 고소 작업시 작업 공간 내에서 발생된 파티클을 제거함으로써, 클린룸 내부의 고청정도를 유지할 수 있다.

    According to the present invention, a clean room workbench can effectively maintain a degree of cleanliness in a clean room by locating a plurality of fan filter units at appropriate positions. Furthermore, it is possible to maintain a high degree of cleanliness inside the clean room by reducing generation of vortex inside the clean room and removing particles generated in the work space when working at high place. The clean room workbench comprises: a base frame; a main frame; a work booth; and a lifting unit.


    Zugriff

    Download


    Exportieren, teilen und zitieren



    Titel :

    WORKBENCH FOR CLEAN ROOM


    Weitere Titelangaben:

    클린룸용 작업대


    Erscheinungsdatum :

    03.07.2025


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Koreanisch


    Klassifikation :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B08B Reinigen allgemein , CLEANING IN GENERAL / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last



    SAFE WORKBENCH, AND WORKBENCH INSTALLING METHOD

    ISHIZAKI HIROKI | Europäisches Patentamt | 2023

    Freier Zugriff

    CLEAN ROOM STRUCTURE

    KAWASHIMA KAZUO | Europäisches Patentamt | 2017

    Freier Zugriff

    Clean room technology

    Useller, James W. / USA, National Aeronautics and Space Administration | TIBKAT | 1969


    Clean Room Technology

    J. W. Useller | NTIS | 1969


    Workbench device

    NAKAMURA MITSUYOSHI | Europäisches Patentamt | 2023

    Freier Zugriff