To provide a single crystal conveyor and a single crystal conveyance method which may reduce crack generation in conveying and moving time while holding a large scale crystal.SOLUTION: The single crystal conveyor includes a holding mechanism part 10 for holding a single crystal and a temperature rising mechanism 30 for raising a part of the holding mechanism 10, and the temperature raising mechanism 30 raises the temperature at a part of the holding mechanism contacting the single crystal. It is desirable that the temperature raising mechanism 30 is installed separately from the holding mechanism 10, and the holding mechanism 10 has a plurality of hand parts 33 for holding a side face of the single crystal, and an operation part for opening/closing the plurality of hand parts 33, and each of the plurality of hand parts 33 has an elastic body R contacting the side part of the single crystal. The single crystal conveyance method includes raising the temperature at the part of the holding mechanism part 10 to a specified temperature by the temperature raising mechanism 30 before holding the single crystal, and holding and conveying the single crystal by the holding mechanism 10 with temperature raised.SELECTED DRAWING: Figure 4
単結晶運搬装置および単結晶運搬方法
2022-05-18
Patent
Elektronische Ressource
Japanisch