A MEMS pressure sensor device (200, 400, 500, 600) is provided that can provide both a linear output with regard to external pressure, and a differential capacitance output so as to improve the signal amplitude level. These benefits are provided through use of a rotating proof mass (250, 420, 520) that generates capacitive output (283, 293) from electrodes configured at both ends of the rotating proof mass. Sensor output can then be generated using a difference between the capacitances generated from the ends of the rotating proof mass. An additional benefit of such a configuration is that the differential capacitance output changes in a more linear fashion with respect to external pressure changes than does a capacitive output from traditional MEMS pressure sensors.


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    Titel :

    Pressure sensor with differential capacitive output


    Weitere Titelangaben:

    Drucksensor mit differenziellem kapazitivem Ausgang
    Capteur de pression à sortie capacitive différentielle


    Beteiligte:
    MCNEIL ANDREW C (Autor:in) / LIN YIZHEN (Autor:in)

    Erscheinungsdatum :

    2018-02-14


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    B60C VEHICLE TYRES , Fahrzeugreifen / G01L Messen von Kraft, mechanischer Spannung, Drehmoment, Arbeit, mechanischer Leistung, mechanischem Wirkungsgrad oder des Drucks von Fluiden , MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE



    Pressure sensor with differential capacitive output

    MCNEIL ANDREW C / LIN YIZHEN | Europäisches Patentamt | 2018

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    Pressure sensor with differential capacitive output

    MCNEIL ANDREW C / LIN YIZHEN | Europäisches Patentamt | 2016

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    The First Production Automotive Capacitive Pressure Sensor

    Marx, Gary M. / Bell, Robert L. | SAE Technical Papers | 1978


    Capacitive sensor

    NAKANO KATSUHIKO / NASU MASAKI / HASEGAWA HIROKAZU et al. | Europäisches Patentamt | 2022

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