The invention discloses a transportation mechanism, a using method thereof and a deposition device, and relates to the technical field of transportation. The conveying mechanism comprises a base, a translation assembly, a lifting assembly, a supporting plate, a bearing plate and a centering assembly. The translation assembly is installed on the base and connected with the lifting assembly, the lifting assembly is connected with the supporting plate, the centering assembly is installed on the supporting plate and connected with the bearing plate, the bearing plate is used for bearing a material carrier, and the centering assembly is used for adjusting the centering degree of the bearing plate. Compared with the prior art, due to the fact that the centering assembly which is installed on the supporting plate and connected with the bearing plate is adopted in the conveying mechanism, the centering precision of the material carrier and the deposition cavity can be effectively improved, the sealing performance of the deposition cavity in the deposition process is guaranteed, the deposition effect is improved, and the product quality is guaranteed.
本发明公开了一种运输机构及其使用方法、沉积装置,涉及运输技术领域。该运输机构包括底座、平移组件、升降组件、托板、承载板和对中组件。平移组件安装于底座上,且与升降组件连接,升降组件与托板连接,对中组件安装于托板上,且与承载板连接,承载板用于承载物料载具,对中组件用于调节承载板的对中度。与现有技术相比,本发明提供的运输机构由于采用了安装于托板上且与承载板连接的对中组件,所以能够有效提高物料载具与沉积腔室的对中精度,保证沉积过程中沉积腔室的密封性,提高沉积效果,保证产品质量。
Transportation mechanism, using method thereof and deposition device
一种运输机构及其使用方法、沉积装置
28.03.2025
Patent
Elektronische Ressource
Chinesisch
IPC: | H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last |
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