The invention belongs to the technical field of integrated circuit manufacturing equipment, and discloses a transfer device and a transfer method. The transfer device is used for transferring a to-be-transferred piece into the reaction container. The transfer device comprises a base assembly and a movement mechanism. The base assembly is provided with a first feeding station and a second feeding station, and a first supporting piece is arranged at the second feeding station. The movement mechanism comprises a second supporting piece, a bottom plate and a lifting assembly, one side of the second supporting piece is used for supporting the to-be-transferred piece, the other side is connected with the output end of the lifting assembly, and the other end of the lifting assembly is connected with the bottom plate; the movement mechanism can slide between the first feeding station and the second feeding station, and when the movement mechanism slides to the second feeding station, the bottom plate can abut against the first supporting piece so that the lifting assembly can drive the second supporting piece to ascend into the reaction container. According to the device, the to-be-transferred piece can be quickly transferred to the reaction container, and the operation difficulty is low. By using the method, the transfer efficiency can be improved.

    本发明属于集成电路制造设备技术领域,公开了一种转运装置和转运方法。该转运装置用于将待转运件转运至反应容器内。转运装置包括底座组件和运动机构。底座组件具有第一上料工位和第二上料工位,第二上料工位处设置有第一支撑件;运动机构包括第二支撑件、底板以及升降组件,第二支撑件一侧用于支撑待转运件,另一侧与升降组件的输出端连接,升降组件的另一端与底板连接;运动机构能够在所述第一上料工位与所述第二上料工位之间滑动,且运动机构滑动至第二上料工位处时,底板能够抵接至第一支撑件,以使升降组件能够带动第二支撑件上升至反应容器内。该装置能够在快速地将待转运件转运至反应容器,操作难度低。使用该方法能够提高转运效率。


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    Titel :

    Transfer device and transfer method


    Weitere Titelangaben:

    转运装置及转运方法


    Beteiligte:
    LI RUI (Autor:in) / SHI GUANGTAO (Autor:in) / HU QIFAN (Autor:in)

    Erscheinungsdatum :

    29.10.2024


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Chinesisch


    Klassifikation :

    IPC:    B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last



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