The measurement and control integrated space micro-electro-mechanical thruster comprises a device body and a control module connected with the device body, the device body comprises a flow control area, a flow monitoring area and a heating area which are sequentially arranged, and a gas flow channel penetrating through the flow control area, the flow monitoring area and the heating area is arranged in the device body; the end, located in the flow control area, of the gas channel is a gas inlet, the other end, located in the heating area, of the gas channel is a gas outlet, and the gas inlet is connected with a gas source. Compared with the prior art, the device body is provided with the flow control area, the flow monitoring area and the heating area, gas flow control, monitoring and heating can be achieved only through the device body, and the overall structural size is small; high-frequency switching action is performed through deformation of the piezoelectric film and the flexible film, stable and continuous gas flow output is realized, and the response time is short; the heating module comprises a heating resistor and a suspended structure, heat is prevented from diffusing into the chip, and the advantages of high stability, reliability and the like are achieved.

    本发明涉及一种测控一体化空间微机电推力器,包括装置本体和与装置本体连接的控制模块,装置本体包括依次设置的流量控制区、流量监测区和加热区,装置本体内设有贯穿流量控制区、流量监测区和加热区气体流道,气体流道位于流量控制区的一端为气体入口,位于加热区的另一端为气体出口,气体入口连接气源。与现有技术相比,本发明具有装置本体设置流量控制区、流量监测区和加热区,仅通过装置本体即可实现气体流量的控制、监测和加热,整体结构体积小;通过压电薄膜和柔性膜的形变进行高频率的开关动作,实现了稳定且连续的气体流量输出,响应时间短;加热模块包括加热电阻和悬空结构,防止热量向芯片内部扩散,实现了高稳定性和可靠性等优点。


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    Titel :

    Measurement and control integrated space micro electro mechanical thruster


    Weitere Titelangaben:

    一种测控一体化空间微机电推力器


    Beteiligte:
    HE WEIGUO (Autor:in) / HU JIANQIANG (Autor:in) / LI ZHEYU (Autor:in)

    Erscheinungsdatum :

    15.10.2024


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Chinesisch


    Klassifikation :

    IPC:    B64G Raumfahrt , COSMONAUTICS



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