The invention discloses a silicon wafer transportation device and a silicon wafer transportation vehicle, and belongs to the technical field of transportation equipment design. The silicon wafer conveying device comprises a device body, a sweeping mechanism and a driving mechanism, the device body is provided with a first containing cavity, and the first containing cavity can be used for containing silicon wafers; the sweeping mechanism and the driving mechanism are both arranged in the first containing cavity, the sweeping mechanism comprises a sweeping part and a dust suction part, the dust suction part is arranged towards the sweeping part, the sweeping part is movably arranged in the first containing cavity, the driving mechanism is connected with the sweeping part, and the sweeping part is movably arranged in the first containing cavity. The driving mechanism can drive the sweeping part to move so that the sweeping part can sweep impurities in the first containing cavity, and the dust collection part can discharge the impurities out of the first containing cavity. According to the scheme, the problems that a silicon wafer transport vehicle related to the related technology is not easy to clean and low in transport efficiency can be solved.
本申请公开一种硅片运输装置和硅片运输车辆,属于运输设备设计技术领域。所公开的硅片运输装置包括装置本体、清扫机构和驱动机构,所述装置本体具有第一容纳腔,所述第一容纳腔可用于容纳硅片;所述清扫机构和所述驱动机构均设于所述第一容纳腔内,所述清扫机构包括清扫件和吸尘件,所述吸尘件朝向所述清扫件设置,且所述清扫件可活动地设于所述第一容纳腔内,所述驱动机构与所述清扫件相连,所述驱动机构可驱动所述清扫件运动,以使所述清扫件可清扫所述第一容纳腔内的杂质,且所述吸尘件可将所述杂质排出所述第一容纳腔。上述方案能够解决相关技术涉及的硅片运输车辆存在较不易清洁以及运输效率较低的问题。
Silicon wafer transport device and silicon wafer transport vehicle
硅片运输装置和硅片运输车辆
2024-01-09
Patent
Elektronische Ressource
Chinesisch
IPC: | B08B Reinigen allgemein , CLEANING IN GENERAL / B60P Fahrzeuge zum Transport von Lasten oder zum Befördern, Tragen oder Aufnehmen besonderer Lasten oder Gegenstände , VEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS / B62D MOTOR VEHICLES , Motorfahrzeuge / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES |