The invention belongs to the technical field of semiconductor and integrated circuit manufacturing, and particularly relates to a lifting rotating arm and semiconductor equipment. The lifting rotating arm comprises a lifting mechanism, a rotating mechanism, a supporting frame and a supporting arm. The lifting mechanism comprises a first driving device and a first movable support, the first driving device is arranged on the supporting frame, the first movable support is connected to the first driving device and located in the supporting frame, and the first driving device can drive the first movable support to move in the vertical direction; the rotating mechanism is connected to the first movable support and can move along with the first movable support in the vertical direction, and the supporting arm is connected to the rotating mechanism and rotates in a plane mode under the action of the rotating mechanism. The lifting rotating arm adjusts the position of the supporting arm through the cooperation of the lifting mechanism and the rotating mechanism, can carry wafers, and is simple and reliable in structure and low in cost. Correspondingly, the wafer carrying equipment with the lifting rotating arm is low in cost, and the competitiveness of products in the market is improved.

    本申请属于半导体及集成电路制造技术领域,尤其是涉及升降旋转臂及半导体设备。该升降旋转臂包括升降机构、旋转机构、支撑框架以及托臂;升降机构包括第一驱动装置以及第一活动支架,第一驱动装置设置于支撑框架,第一活动支架连接于第一驱动装置且位于支撑框架内,第一驱动装置能够驱动第一活动支架沿竖向移动;旋转机构连接于第一活动支架且能够随第一活动支架沿竖向移动,托臂连接于旋转机构且在旋转机构的作用下平面转动。该升降旋转臂通过升降机构与旋转机构配合调整托臂位置,即可实现搬运晶圆,结构简单可靠,成本低廉。相应地,具备该升降旋转臂的晶圆搬运设备成本较低,提高了产品在市场上的竞争力。


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    Titel :

    Lifting rotating arm and semiconductor equipment


    Weitere Titelangaben:

    升降旋转臂及半导体设备


    Beteiligte:
    ZHANG XICHEN (Autor:in)

    Erscheinungsdatum :

    2023-09-08


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Chinesisch


    Klassifikation :

    IPC:    B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last / B25J Manipulatoren , MANIPULATORS / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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