The invention provides a micro diaphragm type electronic vacuum pump. The micro diaphragm type electronic vacuum pump comprises a pump body, a left pump cover, a right pump cover, a diaphragm, a connecting body and a driving mechanism, the left pump cover and the interior of the pump body form an air inlet cavity, and the right pump cover and the interior of the pump body form an exhaust cavity; a connecting flange is arranged in the middle of the pump body, the connecting flange is annular, a circular pipe body is arranged in the middle of the connecting flange, the periphery of the inner side end of the circular pipe body is connected with the inner side end of the connecting flange through a wall plate, and a through hole is formed in the wall plate; the diaphragm is mounted between the connecting flange and the connecting body and can cover the outer side end of the circular tube body, and a magnetic spring seat is mounted in the middle of the diaphragm; the driving mechanism comprises a front magnetic pole, an electromagnetic coil, a rear magnetic pole, an armature, a beam magnetic tube, a main spring and a shell, when the electromagnetic coil is powered on, the armature and the rear magnetic pole can generate magnetism, the diaphragm moves up and down under the action of magnetic field force and elastic force of the spring, and the size of a pump body of a traditional electronic diaphragm pump is effectively reduced.
本发明提供了一种微型膜片式电子真空泵,包括泵体、左泵盖、右泵盖、膜片、连接体和驱动机构;左泵盖与泵体的内部构成进气腔,右泵盖与泵体的内部构成排气腔;泵体的中部设有连接法兰,连接法兰为环状,在连接法兰的中间设有一个圆管体,该圆管体内侧端的外周与连接法兰的内侧端之间通过壁板相连,壁板上设有一个通孔;膜片安装在连接法兰和连接体之间且能够封盖住圆管体的外侧端,膜片的中间装有带磁性的弹簧座;驱动机构包括前磁极、电磁线圈、后磁极、衔铁、束磁管、主弹簧、外壳,当电磁线圈通电时,衔铁和后磁极均能产生磁性,使膜片在磁场力和弹簧弹力的作用下产生上下运动,有效地减小了传统电子膜片泵的泵体体积。
Miniature diaphragm type electronic vacuum pump
一种微型膜片式电子真空泵
2022-09-09
Patent
Elektronische Ressource
Chinesisch
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