The invention belongs to the technical field of Czochralski single crystal, and particularly relates to an electric control lifting arm device for semiconductor single crystal furnace equipment, which comprises a lifting arm, a motor is mounted at the end part of the lifting arm; the position, close to the motor, of the end of the lifting arm is rotationally connected with a thread rolling shaft, and the thread rolling shaft is driven by the motor. A crystal taking lifting hook is arranged on the lower side of the lifting arm; a steel wire rope is arranged at the upper end of the crystal taking lifting hook, and the other end of the steel wire rope penetrates through the lifting arm and is fixedly connected to the outer side of the wire winding shaft; the electric control crystal taking lifting device is arranged on the lifting arm of the equipment, a crystal bar can be taken out without additional equipment, the size is small, integration and convenience are achieved, automatic operation is facilitated, the electric control crystal taking device is installed on the lifting arm of the equipment body, the precision is high, the lifting force is large, installation is convenient, the crystal taking operation is safer and more reliable, and the production efficiency is improved. A control signal is led out from the equipment body, operation is controllable, and human intervention is not needed.

    本发明属于直拉单晶技术领域,具体的说是一种用于半导体单晶炉设备电控提升臂装置,包括提升臂;所述提升臂端部安装有电机;所述提升臂端部靠近电机的位置转动连接有卷丝轴,且卷丝轴由电机驱动;所述提升臂下侧设有取晶吊钩;所述取晶吊钩上端设有钢丝绳,且钢丝绳的另一端穿过提升臂内部并固接在卷丝轴外侧;本发明是在设备本身的提升臂上设置电控取晶提升装置,不需要额外的设备接入即可将晶棒取出,体积小,集成,方便,便于自动化操作,由于电控取晶装置是安装在设备本体提升臂上,本身精度高,提升力大,便于安装,使取晶操作更为安全可靠,控制信号由设备本体引出,运行可控,不需要人为干预。


    Zugriff

    Download


    Exportieren, teilen und zitieren



    Titel :

    Electric control lifting arm device for semiconductor single crystal furnace equipment


    Weitere Titelangaben:

    一种用于半导体单晶炉设备电控提升臂装置


    Beteiligte:
    HU YATAO (Autor:in) / CAO YUBAO (Autor:in) / YIN JIAQI (Autor:in) / JIANG JIAFEI (Autor:in) / XIN SHAN (Autor:in) / ZHANG YI (Autor:in) / LI HUAN (Autor:in)

    Erscheinungsdatum :

    2022-04-08


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Chinesisch


    Klassifikation :

    IPC:    B66C Krane , CRANES / F16N LUBRICATING , Schmierung



    Lifting device for single crystal furnace

    CAO JIANWEI / ZHU LIANG / FU LINJIAN et al. | Europäisches Patentamt | 2023

    Freier Zugriff


    Remote control electric single-chain lifting device

    ZHANG XIHONG | Europäisches Patentamt | 2021

    Freier Zugriff

    Corrugated pipe lifting device suitable for auxiliary chamber of hard-shaft single crystal furnace

    WANG JIANJUN / WANG JIA | Europäisches Patentamt | 2022

    Freier Zugriff

    Lifting device for semiconductor manufacturing equipment

    CHO JAE YONG / KWON DEOK SOON / KANG PONG YOUL et al. | Europäisches Patentamt | 2020

    Freier Zugriff